Control of scanning of ion current density
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21220%2F10%3A00174422" target="_blank" >RIV/68407700:21220/10:00174422 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Control of scanning of ion current density
Original language description
Program controls movement of the mechanical manipulator step motors carrying Faraday probe (FP) for the measurement of the ion current density in the beam. The measurement of the current by the FP is made simultaneously by the measurement of the currentflowing through the sample holder and by the measurement of the current that is provided by the high-voltage power supply. The program retrieves the rest of the process variables from the control unit that controls the pumping of the working chamber andfrom the measurements of the analog signals made by the general-purpose AD/DA card PCL-812.
Czech name
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Czech description
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Classification
Type
R - Software
CEP classification
JC - Computer hardware and software
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Internal product ID
ASW 1
Technical parameters
Skenování iontového svazku Faradayovou komůrkou podstatně zpřesňuje procesní parametry iontové implantace
Economical parameters
Nejsou stanoveny
Owner IČO
68407700
Owner name
České vysoké učení technické v Praze, Fakulta strojní