Control of Process of Ion Implantation and Registration of Technological Parameters
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21220%2F10%3A00174782" target="_blank" >RIV/68407700:21220/10:00174782 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Control of Process of Ion Implantation and Registration of Technological Parameters
Original language description
Program communicates to the control units of the e-gun and ion source and register values of process variables. The pressure, gases flow, and temperature are gained from the measurement of the analog values by the card NI6221. Information in the digitaland graphical form for the control of the implantation process is retrieved from the measured values. Program displays relations of the actual values and graphically displays their history. Program was created in the Borland C++ Builder environment.
Czech name
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Czech description
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Classification
Type
R - Software
CEP classification
JC - Computer hardware and software
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Internal product ID
ASW 2
Technical parameters
Automatizace a registrace procesu využívajícího iontové a elektronové svazky
Economical parameters
Nejsou stanoveny
Owner IČO
68407700
Owner name
České vysoké učení technické v Praze, Fakulta strojní