Influence of process parameters on the structure and properties of chromium oxide films deposited by reactive high power impulse magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21220%2F25%3A00383525" target="_blank" >RIV/68407700:21220/25:00383525 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Influence of process parameters on the structure and properties of chromium oxide films deposited by reactive high power impulse magnetron sputtering

Original language description

In this study thin chromium oxide coatings were prepared by reactive high power impulse magnetron sputtering (HiPIMs), their structure was evaluated, and testing was performed to determine their tribological properties. The coating depositions were conducted on multiple different substrate materials, encapsulating tool steels, and high temperature nickel super alloys Inconel. To achieve significant ion bombardment of the coated surface, either a bias on the substrate or a positive kick on the sputtering target was applied. The impact of these methods on the structure and properties of the coating was then investigated. The surface and cross-section of coatings underwent examination by scanning electron microscopy (SEM), and chemical analysis was performed using energy-dispersive x-ray spectroscopy (EDS). The structure of the coatings was studied using X-ray diffraction (XRD). The influence of the coating process on surface roughness and the presence of coating defects was further studied using phase shifting interferometry (PSI) and optical light microscopy. Tribological testing was performed by pin on disc method at room temperature and high temperature using Al2O3 counterbodies. During high temperatures tests, coatings exhibited low wear and stable friction, predisposing them to use in application at elevated temperature.

Czech name

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Czech description

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Type

O - Miscellaneous

CEP classification

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OECD FORD branch

20506 - Coating and films

Project

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Continuities

S - Specificky vyzkum na vysokych skolach

Publication year

2025

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů