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EN
ČeštinaEnglish

MEMS Structure - Micromirror Array

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F00%3A03023901" target="_blank" >RIV/68407700:21230/00:03023901 - isvavai.cz</a>

  • Result on the web

    —

  • DOI - Digital Object Identifier

    —

Alternative languages

  • Result language

    angličtina

  • Original language name

    MEMS Structure - Micromirror Array

  • Original language description

    Electrostatic actuated micromirrors, design, simulation and modelling, prototype, measurement, encapsulating.

  • Czech name

    —

  • Czech description

    —

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JB - Sensors, detecting elements, measurement and regulation

  • OECD FORD branch

    —

Result continuities

  • Project

    <a href="/en/project/VS97046" target="_blank" >VS97046: Microsystem centre</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2000

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Design, Test, Integration, and Packaging of MEMS/MOEMS

  • ISBN

    0-8194-3645-3

  • ISSN

    —

  • e-ISSN

    —

  • Number of pages

    12

  • Pages from-to

    —

  • Publisher name

    SPIE

  • Place of publication

    Bellingham

  • Event location

    —

  • Event date

    —

  • Type of event by nationality

    —

  • UT code for WoS article

    —