Miniature Silicon Microphone with Non-Planar Back Plate

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F04%3A03098970" target="_blank" >RIV/68407700:21230/04:03098970 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Miniature Silicon Microphone with Non-Planar Back Plate

Original language description

This paper presents the theory of an electrostatic transducer with thin rectangular diaphragm and circular non-planar and non-perforated back electrode, which can be realized by micromechanical technologies. The study leads to the equivalent lumped element circuit.

Czech name

Není k dispozici

Czech description

Není k dispozici

Type

A - Audiovisual production

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

<a href="/en/project/GD102%2F03%2FH086" target="_blank" >GD102/03/H086: Novel approach and coordination of doctoral education in radioelectronics and related disciplines</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2004

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

ISBN

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Place of publication

Praha

Publisher/client name

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Version

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Carrier ID

neuvedeno