Radiation Enhanced Diffusion of Implanted Platinum in Silicon Guided by Helium Co-Implantation for Arbitrary Control of Platinum Profile
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F05%3A03107399" target="_blank" >RIV/68407700:21230/05:03107399 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Radiation Enhanced Diffusion of Implanted Platinum in Silicon Guided by Helium Co-Implantation for Arbitrary Control of Platinum Profile
Original language description
Application of helium co-implantation for production of an arbitrary profile of implanted platinum
Czech name
Radiací stimulovaná difúze implantované platiny pomocí koimplantace helia pro libovolné řízení profilu platiny
Czech description
Radiací stimulovaná difúze implantované platiny pomocí koimplantace helia pro libovolné řízení profilu platiny
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA102%2F03%2F0456" target="_blank" >GA102/03/0456: Novel methods of local lifetime control in semiconductors</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nuclear Instruments and Methods in Physics Research, Section B, Beam Interactions with Materials and Atoms
ISSN
0168-583X
e-ISSN
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Volume of the periodical
230
Issue of the periodical within the volume
1-4
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
5
Pages from-to
225-229
UT code for WoS article
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EID of the result in the Scopus database
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