Design and Simulation of Humidity Microsensors Structure Based on Polymers
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F06%3A03123177" target="_blank" >RIV/68407700:21230/06:03123177 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Design and Simulation of Humidity Microsensors Structure Based on Polymers
Original language description
The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezo-rezistive simulation in CoventorWare. Acquired simulation data gets a primary image about sizes bend and surface strain on micro-cantilever which forms sensing part of sensor.
Czech name
Návrh a simulace polymerních mikro-senzoru vlhkosti
Czech description
Cílem práce je navrhnout jednoduchou strukturu polymerního senzoru vlhkosti a odsimuklovat jeho chování pomocí mechanických a piezorezistivních simulací v programu CoventorWare. Získaná data nám daly základní poedstavu o velikosti ohybu mikro-nosníku a ojeho povrchovém namáhání. Mikronosník v navr3ené struktuoe tvooí snímací eást senzoru..
Classification
Type
D - Article in proceedings
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GD102%2F03%2FH105" target="_blank" >GD102/03/H105: Modern methods of electronic circuit analysis, design and applications</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
The Sixth International Conference on Advanced Semiconductor Devices and Microsystems
ISBN
1-4244-0396-0
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
189-192
Publisher name
Slovak University of Technology
Place of publication
Bratislava
Event location
Smolenice
Event date
Oct 16, 2006
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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