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Design and Simulation of Humidity Microsensors Structure Based on Polymers

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F06%3A03123177" target="_blank" >RIV/68407700:21230/06:03123177 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Design and Simulation of Humidity Microsensors Structure Based on Polymers

  • Original language description

    The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezo-rezistive simulation in CoventorWare. Acquired simulation data gets a primary image about sizes bend and surface strain on micro-cantilever which forms sensing part of sensor.

  • Czech name

    Návrh a simulace polymerních mikro-senzoru vlhkosti

  • Czech description

    Cílem práce je navrhnout jednoduchou strukturu polymerního senzoru vlhkosti a odsimuklovat jeho chování pomocí mechanických a piezorezistivních simulací v programu CoventorWare. Získaná data nám daly základní poedstavu o velikosti ohybu mikro-nosníku a ojeho povrchovém namáhání. Mikronosník v navr3ené struktuoe tvooí snímací eást senzoru..

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JB - Sensors, detecting elements, measurement and regulation

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GD102%2F03%2FH105" target="_blank" >GD102/03/H105: Modern methods of electronic circuit analysis, design and applications</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2006

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    The Sixth International Conference on Advanced Semiconductor Devices and Microsystems

  • ISBN

    1-4244-0396-0

  • ISSN

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

    189-192

  • Publisher name

    Slovak University of Technology

  • Place of publication

    Bratislava

  • Event location

    Smolenice

  • Event date

    Oct 16, 2006

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article