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Design and Characterization of MEMS Thermal Converter

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F07%3A03137185" target="_blank" >RIV/68407700:21230/07:03137185 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Design and Characterization of MEMS Thermal Converter

  • Original language description

    This paper presents design and characterization of a new GaAs based RF Microwave Power Sensor (RFMPS) microsystem. The main criteria for the RFMPS optimization are to keep the stable thermal distribution and minimize the thermal stress. The concept of absorbed power measurement is based on thermal conversion, where absorbed RF power is transformed into thermal power, inside a thermally isolated system.

  • Czech name

    Návrh a charakterizace MEMS teplotního převodníku

  • Czech description

    This paper presents design and characterization of a new GaAs based RF Microwave Power

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GA102%2F06%2F1624" target="_blank" >GA102/06/1624: Micro and nano sensor structures and systems with embedded intelligence (MINASES)</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2007

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Sensors and Transducers

  • ISSN

    1726-5479

  • e-ISSN

  • Volume of the periodical

    2007

  • Issue of the periodical within the volume

    10

  • Country of publishing house

    ES - SPAIN

  • Number of pages

    10

  • Pages from-to

    101-110

  • UT code for WoS article

  • EID of the result in the Scopus database