GaN, GaAs and Silicon based Micromechanical Free Standing Hot Plates for Gas Sensors

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F09%3A00159995" target="_blank" >RIV/68407700:21230/09:00159995 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

GaN, GaAs and Silicon based Micromechanical Free Standing Hot Plates for Gas Sensors

Original language description

Main objective of the presented work deals with design, modelling and characterization of new micro machined GaAs and GaN based hot plate thermal converters which are considered to operate with high temperature metal oxide gas sensors, that can analyse various gases, such as CO, H2, NOx and hydrocarbons.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

<a href="/en/project/GA102%2F09%2F1601" target="_blank" >GA102/09/1601: Intelligent micro and nano structures for microsensors realized with support of nanotechnology</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Eurosensors XXIII: Sensors, Actuators and Micro/Nanosystems

ISBN

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ISSN

1876-6196

e-ISSN

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Number of pages

4

Pages from-to

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Publisher name

Elsevier Science

Place of publication

Lausanne

Event location

Lausanne

Event date

Sep 6, 2009

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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