ERD analysis and modification of TiO2 thin films with heavy ions
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F10%3A00168117" target="_blank" >RIV/68407700:21230/10:00168117 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
ERD analysis and modification of TiO2 thin films with heavy ions
Original language description
Titanium dioxide (TiO2) films have been deposited on Si substrates using reactive magnetron sputtering. The resulting films, having a polycrystalline anatase phase with a dense columnar structure, were analysed by time-of-flight elastic recoil detectionanalysis (ToF-ERDA) using 40 MeV I9+ ions. A clear decrease in the areal atomic density (atoms/cm2) of Ti and O was observed during measurement, but the stoichiometry remained essentially constant up to a fluence of 4 × 1013 ions/cm2. To investigate thiseffect in more detail, X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) were applied in order to characterize the films prior to and after ion irradiation with fluences in the range of 1010-1013 ions/cm2. Distinct morphological and structural changes of the polycrystalline film were observed. XRD revealed that the crystallinity of the film was gradually destroyed, and the film became amorphous at a fluence above 5 × 1012 ions/cm2.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JK - Corrosion and material surfaces
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GAP108%2F10%2F0218" target="_blank" >GAP108/10/0218: Advanced self-adaptive low friction coatings based on transition metal dichalcogenides alloyed with carbon</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nuclear Instruments and Methods in Physics Research, Section B, Beam Interactions with Materials and Atoms
ISSN
0168-583X
e-ISSN
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Volume of the periodical
268
Issue of the periodical within the volume
11-12
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
6
Pages from-to
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UT code for WoS article
000278702300044
EID of the result in the Scopus database
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