Microwave Impedance Measurement for Nanoelectronics

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F11%3A00180069" target="_blank" >RIV/68407700:21230/11:00180069 - isvavai.cz</a>
Result on the web
<a href="http://www.radioeng.cz/papers/2011-1.htm" target="_blank" >http://www.radioeng.cz/papers/2011-1.htm</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Microwave Impedance Measurement for Nanoelectronics
Original language description
The rapid progress in nanoelectronics showed an urgent need for microwave measurement of impedances extremely different from the 50? reference impedance of measurement instruments. In commonly used methods input impedance or admitance of a device under test (DUT) is derived from measured value of its reflection coefficient causing serious accuracy problems for very high and very low impedances due to insufficient sensitivity of the reflection coefficient to impedance of the DUT. This paper brings theoretical description and experimental verification of a method developed especially for measurement of extreme impedances. The method can significantly improve measurement sensitivity and reduce errors caused by the VNA.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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