3D Energy Harvester Evaluation

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F13%3A00205028" target="_blank" >RIV/68407700:21230/13:00205028 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
3D Energy Harvester Evaluation
Original language description
This paper discusses the characterization and evaluation of an MEMS based electrostatic generator, a part of the power supply unit of the self-powered microsystem. The designed generator is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor. The structure is designed and modeled as three-dimensional silicon based MEMS. With innovative approach we reached a very low resonant frequency f the structure (about 100Hz.) The modified long cantilever spring design with minimum area of the chip, its ability to work in 3D mode, and the ability to be tuned to reach desired parameters, proves promising directions of possible furtherdevelopment.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Project
<a href="/en/project/VG20102015015" target="_blank" >VG20102015015: Miniature intelligent system for analyzing concentrations of gases and pollutants, particularly toxic</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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