Hydrogen-terminated Diamond Surface as Gas Sensing Layer Working at Room Temperature

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F15%3A00234637" target="_blank" >RIV/68407700:21230/15:00234637 - isvavai.cz</a>
Result on the web
<a href="http://www.nanocon.eu/files/proceedings/23/papers/4530.pdf" target="_blank" >http://www.nanocon.eu/files/proceedings/23/papers/4530.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Hydrogen-terminated Diamond Surface as Gas Sensing Layer Working at Room Temperature
Original language description
Nanocrystalline diamond (NCD) films were grown on the commercially available sensor product consisted of a bulit-in microheater, a platinum temperature sensor, and a pair of Pt interdigitated electrodes using microwave plasma enhanced chemical vapor deposition process. We investigated the effect of fluorine- and hydrogen-terminated diamond surface on the gas sensing properties at room temperature. The gas sensing properties diamond-based sensor were measured by the changes of electrical resistance to various volatile organic compounds(C6H6, C3H6O, isopropylalcohol) and relative humidity. The comparative sensing performance of hydrogenated diamond surface shows improvement in sensitivity toward benzene, acetone, isopropylalcohol and humid air in contrast to fluorinated diamond surface, where the surface conductivity was suppressed. The sensor functionality was explained by the surface transfer doping effect.
Czech name
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Czech description
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Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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