Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F16%3A00243217" target="_blank" >RIV/68407700:21230/16:00243217 - isvavai.cz</a>

Alternative codes found

RIV/68378271:_____/16:00467513 RIV/60461373:22310/16:43902116

Result on the web

<a href="http://www.sciencedirect.com/science/article/pii/S0040609016300955" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0040609016300955</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2016.04.026" target="_blank" >10.1016/j.tsf.2016.04.026</a>

Result language

angličtina

Original language name

Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides

Original language description

The intrinsic hydrogenated amorphous silicon (a-Si:H) near infrared planar waveguides were grown on glass substrates from silane/hydrogen mixture at the substrate temperature about 250°C. Nanocrystalline diamond (NCD) coatings with reduced surface roughness were grown on a-Si:H by the microwave plasma enhanced chemical vapor deposition from hydrogen rich plasma with adding methane and carbon dioxide at temperature as low as 210°C. The optical absorptance spectra, Raman spectra and scanning electron microscopy (SEM) reveal the diamond character of the coatings as well as the stability of a-Si:H layer during diamond deposition. The critical issue for applying NCD/a-Si:H structures as optical waveguides is the optical absorption in NCD coatings. The COMSOL Multiphysics FEM simulations show that the near infrared optical absorptance in NCD coating must be reduced below 10/cm to reduce the optical attenuation in NCD/a-Si:H waveguide below 1 dB/cm.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

20201 - Electrical and electronic engineering

Project

<a href="/en/project/FR-TI3%2F797" target="_blank" >FR-TI3/797: *Investigation and development of technology of the polymer optical selective components for informatics and sensors</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2016

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Volume of the periodical

618

Issue of the periodical within the volume

Part A

Country of publishing house

CH - SWITZERLAND

Number of pages

4

Pages from-to

130-133

UT code for WoS article

000389112000024

EID of the result in the Scopus database

2-s2.0-84995890844