Employing model based failure mode and effect analysis for sputtering process

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F16%3A00303283" target="_blank" >RIV/68407700:21230/16:00303283 - isvavai.cz</a>
Result on the web
<a href="http://ieeexplore.ieee.org/document/7563206/" target="_blank" >http://ieeexplore.ieee.org/document/7563206/</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/ISSE.2016.7563206" target="_blank" >10.1109/ISSE.2016.7563206</a>

Result language
angličtina
Original language name
Employing model based failure mode and effect analysis for sputtering process
Original language description
This contribution introduces Failure Mode and Effect Analysis (FMEA) method applied to sputtering process. A model based paradigm is used for executing the FMEA method. The Authors employ this approach for increasing its efficiency and productivity. This work builds on the achievements resulting from the previous works concerning applying the Model Based FMEA method for the technological processes and products. In this article we present a knowledge model of sputtering process as well as meta-model of process generally. Finally, the report of potential defects, causes, consequences and provisions for investigating sputtering process in the FMEA sheet form is presented.
Czech name
—
Czech description
—

Project
—
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the International Spring Seminar on Electronics Technology
ISBN
978-1-5090-1390-6
ISSN
2161-2528
e-ISSN
—
Number of pages
5
Pages from-to
285-289
Publisher name
IEEE Press
Place of publication
New York
Event location
Plzeň
Event date
May 18, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000387089800057

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