In-situ Raman spectroscopy characterization of SU-8 epoxy resin temperature dependent curing process

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F19%3A00334118" target="_blank" >RIV/68407700:21230/19:00334118 - isvavai.cz</a>
Result on the web
<a href="http://hdl.handle.net/10467/87115" target="_blank" >http://hdl.handle.net/10467/87115</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
In-situ Raman spectroscopy characterization of SU-8 epoxy resin temperature dependent curing process
Original language description
The SU-8 is commonly used epoxy-based photoresist in manufacturing microfluidics and microelectromechanical systems (MEMS). In this paper, we investigated temperature dependent polymerization process of SU-8 by means of Raman spectroscopy. The Raman spectrum were recorded in-situ during the heating of the sample from 25 to 160 degrees of Celsius. From the collected spectrum we can observe increase in the intensity of 1183 cm-1 and 1108 cm-1 peaks corresponding to the asymmetric vibrations of C-O-C bond in polymer and decrease in the intensity of 930 cm-1 peak attributed to symmetric vibration of C-O-C bond in the polymer.
Czech name
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Czech description
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Project
<a href="/en/project/EF16_019%2F0000778" target="_blank" >EF16_019/0000778: Center for advanced applied science</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the International Student Scientific Conference Poster – 23/2019
ISBN
978-80-01-06581-5
ISSN
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e-ISSN
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Number of pages
3
Pages from-to
1-3
Publisher name
ČVUT FEL, Středisko vědecko-technických informací
Place of publication
Praha
Event location
ČVUT FEL, Technická 2, Praha 6
Event date
May 23, 2019
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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