Epoxy polymer optical waveguide for micro-opto-electro-mechanical systems
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F20%3A00341831" target="_blank" >RIV/68407700:21230/20:00341831 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1007/s00542-020-04921-7" target="_blank" >https://doi.org/10.1007/s00542-020-04921-7</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/s00542-020-04921-7" target="_blank" >10.1007/s00542-020-04921-7</a>
Alternative languages
Result language
angličtina
Original language name
Epoxy polymer optical waveguide for micro-opto-electro-mechanical systems
Original language description
The paper reports on the fabrication and characterisation of E3135 epoxy polymer planar waveguides fabricated onto allyl diglycol carbonate substrate. We measured transmission spectra from the visible to near-infrared region and studied waveguiding properties by the m-line spectroscopy using six lasers (532.0, 654.2, 846.4, 1308.2, 1549.1 and 1652.1 nm). Optical scattering losses of the planar waveguides were measured by the fibre scanning method. The lowest values of the optical losses were 0.33 dB/cm at 632.8 nm and 0.35 dB/cm at 850 nm. Our research showed that the epoxy polymer E3135 is a promising material for the implementation into the MOEMS structures with higher integration density, thus it allows for realisation low-cost and feasibly elaborated MOEMS components.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20501 - Materials engineering
Result continuities
Project
—
Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Microsystem Technologies
ISSN
0946-7076
e-ISSN
1432-1858
Volume of the periodical
26
Issue of the periodical within the volume
9
Country of publishing house
DE - GERMANY
Number of pages
7
Pages from-to
3029-3035
UT code for WoS article
000539170800001
EID of the result in the Scopus database
2-s2.0-85086169827