Measurement of nonlinear distortion of MEMS microphones

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F21%3A00344637" target="_blank" >RIV/68407700:21230/21:00344637 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21260/21:00344637
Result on the web
<a href="https://doi.org/10.1016/j.apacoust.2020.107802" target="_blank" >https://doi.org/10.1016/j.apacoust.2020.107802</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.apacoust.2020.107802" target="_blank" >10.1016/j.apacoust.2020.107802</a>

Result language
angličtina
Original language name
Measurement of nonlinear distortion of MEMS microphones
Original language description
An experimental investigation on the nonlinear behaviour of the MEMS microphones is of rising interest as their use is growing rapidly not only in the domain of consumer audio devices but also in the measurement applications where higher precision is needed. The present work uses a recently published method allowing a distortionless harmonic excitation at high-pressure levels to measure and examine the distortion of single backplate MEMS microphones. The measured distortion is compared with the values predicted by a simple model of the nonlinearities originating in the electrostatic transduction principle. A good agreement between the predicted and the measured values of the second harmonic is shown. The level of the third harmonic is influenced by nonlinear effects not taken into account in the simple model and therefore deviates from the predicted values.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10307 - Acoustics

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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