Structure, Morphology, Thermal Stability and Oxidation Resistance of Multilayered TiSiN/VN Films: Influence of TiSiN-Layer Thickness

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F21%3A00355980" target="_blank" >RIV/68407700:21230/21:00355980 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1007/s11665-021-05560-3" target="_blank" >https://doi.org/10.1007/s11665-021-05560-3</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/s11665-021-05560-3" target="_blank" >10.1007/s11665-021-05560-3</a>

Result language
angličtina
Original language name
Structure, Morphology, Thermal Stability and Oxidation Resistance of Multilayered TiSiN/VN Films: Influence of TiSiN-Layer Thickness
Original language description
In this paper, the influence of TiSiN layer thickness of TiSiN/VN multilayered films, deposited by DC reactive magnetron sputtering, on the structure, mechanical properties, thermal stability and, essentially, oxidation resistance is investigated. The films adhere well to the substrates and show a columnar structure growth, being the one with the highest TiSiN layer thickness the more compact. The as-deposited films exhibit fcc structure with broad diffraction peaks positioned between the TiN and VN standard peaks. Annealing at 800 degrees C for 2 h promotes structural changes in the films, i.e., single fcc diffraction peaks are subdivided into two diffraction contributions. The onset point of oxidation of the films is ( )similar to 550 degrees C, independently of the thickness of the TiSiN layer. A strong diffusion of V to the top surface occurs for the film with the lowest TiSiN layer thickness. Thicker TiSiN layers offer a better barrier layer to the V diffusion due to the formation of a higher amount of protective oxides. The strong diffusion of V produces a plate-like V2O5 discontinuous layer on the top and a porous Ti-Si-V-O rich thick layer underneath.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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