Multi-Foil Optic Condenser for a Laser Plasma EUV Source

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F06%3A04123155" target="_blank" >RIV/68407700:21340/06:04123155 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Multi-Foil Optic Condenser for a Laser Plasma EUV Source

Original language description

Design and development of the multi-foil optic (MFO) condenser for a gas puff laser plasma source for EUV lithography is presented. The MFO in general is a soft x-ray optic which consists of two perpendicular sets of very thin reflecting surfaces, wherephotons are reflected at grazing angles. The aim of the work was to design the condenser working for ~100 eV photons focusing from point to point ~40 cm distant. Initial design and simulations are described and compared to early experiments performed invisible light. The performance of the optic over the initial requirements is discussed. We also briefly discuss several other MFO modifications, including condensers and collimators for laboratory purposes or the wide field x-ray scanning modules for satellite astronomy.

Czech name

Není k dispozici

Czech description

Není k dispozici

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2006

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Physica Scripta

ISSN

0031-8949

e-ISSN

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Volume of the periodical

2006

Issue of the periodical within the volume

T123

Country of publishing house

SE - SWEDEN

Number of pages

4

Pages from-to

131-134

UT code for WoS article

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EID of the result in the Scopus database

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