Controlled structuring of self-assembled polystyrene microsphere arrays by two different plasma systems
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F13%3A00217124" target="_blank" >RIV/68407700:21340/13:00217124 - isvavai.cz</a>
Result on the web
<a href="http://www.nanocon.eu/files/proceedings/14/reports/2086.pdf" target="_blank" >http://www.nanocon.eu/files/proceedings/14/reports/2086.pdf</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Controlled structuring of self-assembled polystyrene microsphere arrays by two different plasma systems
Original language description
Nanosphere lithography is a simple and time-efficient technique which is often recognized as an alternative to conventional top-down approaches standardly used in nanofabrication. In this study we present a successful manipulation of microspheres by reactive ion etching (RIE). A self-assembled monolayer close-packed array of monodisperse polystyrene microspheres (PM) with diameter of 471 nm was used as the primary template. The PM templates were processed in two different RIE systems: (i) capacitively coupled radiofrequency plasma (CCP) and (ii) dual plasma system which combines CCP and pulsed linear-antenna microwave plasma (PLAMWP).
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA13-20110S" target="_blank" >GA13-20110S: New substrates and approaches for sensitive and reproducible biomolecular sensing by means of surface-enhanced Raman scattering (SERS) spectroscopy</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
5th International Conference NANOCON 2013 Conference Proceedings
ISBN
978-80-87294-44-4
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
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Publisher name
TANGER, spol.s r.o.
Place of publication
Ostrava
Event location
Brno
Event date
Oct 16, 2013
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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