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EUV ablation of organic polymers at a high fluence

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F14%3A00228797" target="_blank" >RIV/68407700:21340/14:00228797 - isvavai.cz</a>

  • Result on the web

    <a href="http://journals.cambridge.org/download.php?file=%2F7602_1FBEB1CB857F232DBFA674E116746B1B_journals__HPL_HPL2_S2095471914000310a.pdf&cover=Y&code=748dc0cdc24cafbaec9cdaa4de02bcf5" target="_blank" >http://journals.cambridge.org/download.php?file=%2F7602_1FBEB1CB857F232DBFA674E116746B1B_journals__HPL_HPL2_S2095471914000310a.pdf&cover=Y&code=748dc0cdc24cafbaec9cdaa4de02bcf5</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1017/hpl.2014.31" target="_blank" >10.1017/hpl.2014.31</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    EUV ablation of organic polymers at a high fluence

  • Original language description

    Abstract A preliminary investigation on short-wavelength ablation mechanisms of poly (methyl methacrylate)(PMMA) and poly (1, 4-phenylene ether ether-sulfone)(PPEES) by extreme ultraviolet (EUV) radiation at 13.5 nm using a table-top laser-produced plasma from a gas-puff target at LLG (Göttingen) and at 46.9 nm by a 10 Hz desktop capillary discharge laser operated at the Institute of Physics (Prague) is presented. Ablation of polymer materials is initiated by photo-induced polymer chain scissions.

  • Czech name

  • Czech description

Classification

  • Type

    O - Miscellaneous

  • CEP classification

    BH - Optics, masers and lasers

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/LD14032" target="_blank" >LD14032: Advanced methods for X-metrology and imaging</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů