XUV generation from the interaction of pico- and nanosecond laser pulses with nanostructured targets
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F17%3A00312909" target="_blank" >RIV/68407700:21340/17:00312909 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2265984" target="_blank" >http://dx.doi.org/10.1117/12.2265984</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2265984" target="_blank" >10.1117/12.2265984</a>
Alternative languages
Result language
angličtina
Original language name
XUV generation from the interaction of pico- and nanosecond laser pulses with nanostructured targets
Original language description
Laser-produced plasmas are intense sources of XUV radiation that can be suitable for different applications such as extreme ultraviolet lithography, beyond extreme ultraviolet lithography and water window imaging. We have investigated the spectral behavior of the laser produced plasmas formed on closely packed polystyrene microspheres and porous alumina targets covered by a thin tin layer in the spectral region from 2.5 to 16 nm. Nd:YAG lasers delivering pulses of 170 ps (Ekspla SL312P )and 7 ns (Continuum Surelite) duration were focused onto the nanostructured targets coated with tin. The intensity dependence of the recorded spectra was studied; the conversion efficiency (CE) of laser energy into the emission in the 13.5 nm spectral region was estimated. We have observed an increase in CE using high intensity 170 ps Nd:YAG laser pulses as compared with a 7 ns pulse.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
X-ray Lasers and Coherent X-ray Sources: Development and Applications
ISBN
978-1-5106-0987-7
ISSN
0277-786X
e-ISSN
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Number of pages
7
Pages from-to
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Publisher name
SPIE
Place of publication
Baltimore
Event location
Praha
Event date
Apr 24, 2017
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000406855700026