Conductive Gas Sensors Prepared Using PLD
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F10%3A00180922" target="_blank" >RIV/68407700:21460/10:00180922 - isvavai.cz</a>
Result on the web
<a href="http://books.google.com/books?hl=en&lr=&id=SnFBsP7L9VoC&oi=fnd&pg=PA390&dq=conductive+gas+sensors+prepared+using+PLD&ots=vKlvAON" target="_blank" >http://books.google.com/books?hl=en&lr=&id=SnFBsP7L9VoC&oi=fnd&pg=PA390&dq=conductive+gas+sensors+prepared+using+PLD&ots=vKlvAON</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/978-94-007-0903-4" target="_blank" >10.1007/978-94-007-0903-4</a>
Alternative languages
Result language
angličtina
Original language name
Conductive Gas Sensors Prepared Using PLD
Original language description
This contribution deals with conductive thin film gas sensors fabricated using laser technology. The principles of the pulsed laser deposition (PLD) technology is explained. Hybrid PLD systems based on a conbination of PLD and magnetron sputtering. PLD and RF discharges, and PLD with two laser targets are also presented. The growing layers can be modified by an ion beam. Organic films can be grown using the cryogenic MAPLE technology. Nanocrystalline and nanocomposite thin films for gas sensors can be deposited. Examples of layer fabrication and testing of layer properties for gas sensors are given.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the NATO Advanced Study Institute on Nanotechnological Basic for Advanced Sensors
ISBN
978-94-007-0903-4
ISSN
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e-ISSN
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Number of pages
9
Pages from-to
391-399
Publisher name
Springer
Place of publication
Dordrecht
Event location
Sozopol
Event date
May 30, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000292658400040