DLC Layers prepared by PLD with Ion Bombardment

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F12%3A00198205" target="_blank" >RIV/68407700:21460/12:00198205 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
DLC Layers prepared by PLD with Ion Bombardment
Original language description
Physical and mechanical properties of diamond-like carbon (DLC) thin layers prepared by pulsed laser deposition with ion bombardment were studied. DLC films were fabricated by pulsed laser deposition technique (PLD). The film growth was modified during the deposition by ion bombardment with argon and krypton ions. The films with high and low diamond/graphite ratio were prepared by changing the laser energy density on the graphite target from 4 Jcm-2 to 14 Jcm-2. Energy of ions was changed by gun voltageand ionic current and was up to 210 eV. The content of sp2 "graphite" and sp3 "diamond" bonds was measured using X-ray photoelectron and X-ray induced Auger electron spectroscopies. We found the highest sp3 contend for ions bombardment of 40 eV. We studied mechanical properties of layers. Hardness and reduced Young's modulus were determined using the method Quasistatic nanoindentation and a special diamond Fluid Berkovich tip. Young´s modulus was studied through the use of resonant ultr
Czech name
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Czech description
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Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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