MEMS Sensors and its Application
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F70883521%3A28140%2F10%3A63508997" target="_blank" >RIV/70883521:28140/10:63508997 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
MEMS Sensors and its Application
Original language description
The big progress has the field of MEMS (Micro-Electro-Mechanical-System) sensors in this time. Miniaturization, high sensitivity, integration sensors and signal condition and communication circuits, reliability are the reason. The base of MEMS sensors isnew technology of semiconductors, which can realize micromechanical elements, capacitance with moved electrode, inductance, rolled parts, micromotors, micropumps, touch elements, microphones, electronical elements. Using of the MEMS sensors has wide range from control, informatics, medicine and security in its technical means.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Result continuities
Project
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Continuities
V - Vyzkumna aktivita podporovana z jinych verejnych zdroju
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 21st International DAAAM Symposium "Intelligent Manufacturing & Automation: Focus on Interdisciplinary Solutions"
ISBN
978-3-901509-73-5
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
DAAAM International Vienna
Place of publication
Vienna
Event location
Zadar, Croatia
Event date
Jan 1, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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