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MEMS Sensors and its Application

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F70883521%3A28140%2F10%3A63508997" target="_blank" >RIV/70883521:28140/10:63508997 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    MEMS Sensors and its Application

  • Original language description

    The big progress has the field of MEMS (Micro-Electro-Mechanical-System) sensors in this time. Miniaturization, high sensitivity, integration sensors and signal condition and communication circuits, reliability are the reason. The base of MEMS sensors isnew technology of semiconductors, which can realize micromechanical elements, capacitance with moved electrode, inductance, rolled parts, micromotors, micropumps, touch elements, microphones, electronical elements. Using of the MEMS sensors has wide range from control, informatics, medicine and security in its technical means.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JB - Sensors, detecting elements, measurement and regulation

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    V - Vyzkumna aktivita podporovana z jinych verejnych zdroju

Others

  • Publication year

    2010

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of the 21st International DAAAM Symposium "Intelligent Manufacturing & Automation: Focus on Interdisciplinary Solutions"

  • ISBN

    978-3-901509-73-5

  • ISSN

  • e-ISSN

  • Number of pages

    2

  • Pages from-to

  • Publisher name

    DAAAM International Vienna

  • Place of publication

    Vienna

  • Event location

    Zadar, Croatia

  • Event date

    Jan 1, 2010

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article