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Impact of neutral gas temperatures on reactive magnetron sputtering
Temperature is an important parameter which influences whole sputtering process. A model of reactive magnetron sputtering was used to investigate an effect of different temperatures in reactor during reactive sputtering on ...
BL - Fyzika plasmatu a výboje v plynech
- 2010 •
- D
Rok uplatnění
D - Stať ve sborníku
Modelling of sputtering yield amplification effect in reactive deposition of oxides
Many reactive sputter deposition applications require high deposition rates. The primary limiting parameters in magnetron sputtering are the target power dissipation and sputtering yields of the target elements. In reactive...
BL - Fyzika plasmatu a výboje v plynech
- 2010 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
R.f. sputtering of polyimide
R.f. sputtering of polyimide...
BM - Fyzika pevných látek a magnetismus
- 2004 •
- D
Rok uplatnění
D - Stať ve sborníku
Rf sputtering of polypropylene
Rf sputtering of polypropylene...
BM - Fyzika pevných látek a magnetismus
- 2002 •
- D
Rok uplatnění
D - Stať ve sborníku
Rf sputtering of Hydrocarbon Polymers
Rf sputtering of Hydrocarbon Polymers...
BM - Fyzika pevných látek a magnetismus
- 2002 •
- D
Rok uplatnění
D - Stať ve sborníku
Rf magnetron sputtering of polypropylene
Rf magnetron sputtering of polypropylene...
BM - Fyzika pevných látek a magnetismus
- 2004 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Investigation of the ion sputtering process of the (SiC)1-x(AlN)x ceramic target
This paper describes the theoretical analysis of ion sputtering of multicomponent targets on the basis of (SiC)1-x(AlN)x. The features of ion sputtering are studied.They are connected with consideration necessity of sputtering
JA - Elektronika a optoelektronika, elektrotechnika
- 2012 •
- D
Rok uplatnění
D - Stať ve sborníku
Sputtering onto liquids: a critical review
Sputter deposition of atoms onto liquid substrates aims at producing colloidal dispersions of small monodisperse ultrapure nanoparticles (NPs). Since sputtering onto of (magnetron) sputter deposition and the formation of NP...
Condensed matter physics (including formerly solid state physics, supercond.)
- 2022 •
- Jimp •
- Link
Rok uplatnění
Jimp - Článek v periodiku v databázi Web of Science
Výsledek na webu
Rf sputtering of hydrocarbon polymers and their derivates
Rf sputtering of hydrocarbon polymers and their derivates...
BM - Fyzika pevných látek a magnetismus
- 2003 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Behaviour of hybrid PVD-PECVD process of Ti sputtering in argon and acetylene atmosphere
Hybrid PVD-PECVD sputtering process was studied for the case of titanium target sputtering in argon and acetylene atmosphere. The hybrid PVD-PECVD process combines aspects of conventional sputtering of metal target with hyd...
BL - Fyzika plasmatu a výboje v plynech
- 2010 •
- D
Rok uplatnění
D - Stať ve sborníku
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