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Binary diffractive optical element for Bessel beam correction
Binary phase diffractive optical element was designed for the purpose of correction/suppression of Bessel beam side peaks. The sample was fabricated by the way of reactive ion etching of glass substrate over the metal mask....
Optics (including laser optics and quantum optics)
- 2020 •
- Gfunk
Rok uplatnění
Gfunk - Funkční vzorek
SMV-2019-03: Thin membranes
The development of technology for preparation of very thin silicon nitride membrane for use in low energy electron spectroscopy. Several techniques for preparation of thin membranes were tested during the development – wet etching, react...
Nano-processes (applications on nano-scale); (biomaterials to be 2.9)
- 2019 •
- Vsouhrn
Rok uplatnění
Vsouhrn - Souhrnná výzkumná zpráva
Laser system for determination of the depth of etching in a deep reactive ion etching system
We present a method of laser interferometry appropriate for precise determination of the depth of etching in a deep reactive ion etching system (DRIE), primarily used for manufacturing of micro-electro-mechanical...
Optics (including laser optics and quantum optics)
- 2017 •
- Jost
Rok uplatnění
Jost - Ostatní články v recenzovaných periodicích
Interferometric measuring system for deep reactive ion etching system
The device is designed to accurately measure the depth of etching in a deep reactive etching system. Measurements can be made in real time, allowing you to stop the etching process after reaching a certain depth of...
Optics (including laser optics and quantum optics)
- 2017 •
- Gfunk
Rok uplatnění
Gfunk - Funkční vzorek
The manufacturing process of apodized phase masks
lithography and reactive ion etching. Fused silica with a thickness of 2,286 mm is used. The amallest step of the pitch can be up to 0,1 nm. The etching of molybdenum mask is carried out with reactive
Optics (including laser optics and quantum optics)
- 2023 •
- Ztech
Rok uplatnění
Ztech - Ověřená technologie
Structuring of diamond films by reactive ion plasma etching
In this study, two common strategies of diamond film structuring are described. Main focus is on the comparison of top-down and the bottom-up strategies. The top-down strategy is primary related to dry reactive ion etching ...
BM - Fyzika pevných látek a magnetismus
- 2012 •
- D
Rok uplatnění
D - Stať ve sborníku
Diffractive beam splitter with high precision of angular distribution
Binary phase diffractive optical element was designed as a beam splitter with high number of diffractive orders. The sample was manufactured with use of e-beam lithography and reactive ion etching....
Optics (including laser optics and quantum optics)
- 2022 •
- Gfunk
Rok uplatnění
Gfunk - Funkční vzorek
Binary phase masks fabrication using the method of e-beam lithography and reactive ion etching for optical fiber sensors manufacturing
This contribution deals with the fabrication of binary phase masks using the method of e-beam lithography and reactive ion etching for the manufacturing of optical fiber sensors. The research was focused on the adjusting of...
Electrical and electronic engineering
- 2022 •
- D
Rok uplatnění
D - Stať ve sborníku
Spectroscopic system for deep reactive ion etching system
The device is designed to accurately measure spectral response of substrate in a deep reactive etching system. Measurements system can real time monitor chemical composition of plasma cloud in the chamber, allowing you to stop the <...
Optics (including laser optics and quantum optics)
- 2018 •
- Gfunk
Rok uplatnění
Gfunk - Funkční vzorek
Microfluidic device based on deep reactive ion etching process and its lag effect for single cell capture and extraction
We introduced a microfluidic device for high-efficiency single cell capture and their subsequent extraction. It was fabricated by using a deep reactive ion etching process taking advantage of the lag effect. We accomplished...
Nano-processes (applications on nano-scale); (biomaterials to be 2.9)
- 2018 •
- Jimp •
- Link
Rok uplatnění
Jimp - Článek v periodiku v databázi Web of Science
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