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12 415 (0,153s)

Result

Deposition of thin titanium-copper films with antimicrobial effect by advanced magnetron sputtering methods

The antibacterial effect of thin titanium-copper (Ti-Cu) films combined were prepared by three different plasma-assisted magnetron sputtering methods: direct current magnetron sputtering (dc-MS), dual magnetron

BM - Fyzika pevných látek a magnetismus

  • 2011
  • Jx
  • Link
Result

Gas aggregation nanocluster source ? Reactive sputter deposition of copper and titanium nanoclusters

Copper and titanium nanoclusters in Ar and in Ar+O2 gas mixtures were prepared using a magnetron based gas aggregation cluster source designed for Ultra High Vacuum operation. A considerable influence of oxygen addition on the forma...

JJ - Ostatní materiály

  • 2011
  • Jx
  • Link
Result

A phenomenological equilibrium model applicable to high-power pulsed magnetron sputtering

of copper and titanium measured by us during high-power pulsed dc magnetron sputteringWe present a phenomenological equilibrium model applicable to high-power pulsed dc magnetron sputtering with relatively long st...

BL - Fyzika plasmatu a výboje v plynech

  • 2010
  • Jx
Result

Planar Heating Element Adjusted by Electron Beam Micromachining

This paper describes a planar heating element suitable for vacuum. The basis of this element is a ceramic plate with a thin layer of titanium deposited by magnetron sputtering. The copper contacts are brazed to the opposite...

JA - Elektronika a optoelektronika, elektrotechnika

  • 2009
  • Jx
Result

Oxidation behavior of Cu nanoparticles embedded into semiconductive TiO2 matrix

Metal nanoparticles embedded into a semiconductive matrix represent a promising material for widely sought advanced technological applications. We focused our interest on the preparation of TiO2 matrix with embedded Cu nanoparticles. In particular, w...

Fluids and plasma physics (including surface physics)

  • 2015
  • Jimp
  • Link
Result

Suppressed hysteresis behaviour of titanium sputtering in acetylene gas.

This contribution deals with suppressed hysteresis behaviour of titanium sputtering in argon and acetylene mixture.

BL - Fyzika plasmatu a výboje v plynech

  • 2009
  • O
Result

Temporal evolution of sputtered species number densities in reactive HiPIMS with nitrogen admixture

of discharge current, voltage, pressure and ionization fraction of sputtered species in HiPIMS process is analyzed. The temporal evolution of an absolute number of sputtered titanium atom and ion density is estimated durin...

Fluids and plasma physics (including surface physics)

  • 2019
  • O
Result

High-power pulsed magnetron sputtering: Model and experiments

materials (copper and titanium) with very different characteristics. A completelyThe original model developed by Christie (2005) for high-power pulsed magnetron sputtering was modified. A weak additional ionization of ...

BL - Fyzika plasmatu a výboje v plynech

  • 2007
  • D
Result

Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process

Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process...

BL - Fyzika plasmatu a výboje v plynech

  • 2007
  • Jx
Result

Experimental study of hybrid PVD-PECVD process of titanium target sputtering in argon and acetylene

This contribution deals with the experimental study of hybrid PVD-PECVD process of titanium sputtering in argon and acetylene.

BL - Fyzika plasmatu a výboje v plynech

  • 2011
  • O
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