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Modeling and Simulation of Gas-Damped Electrostatic Actuators of MEMS Devices
electrostatic MEMS actuator and its solution by the finite element method (FEM). The model electrostatics,solid mechanics and gas dynamics. Moreover, the multiphysics model can be simply complemented with a model of contro...
JA - Elektronika a optoelektronika, elektrotechnika
- 2009 •
- D
Rok uplatnění
D - Stať ve sborníku
Operating sample of sliding actuator controlled electrostatically
Operating sample of sliding actuator simulates the real function of muscle cell in magnification 1 000 000 : 1. Substitutes van der Waals forces by interruption of the effect of the electrostatic forces....
EI - Biotechnologie a bionika
- 2008 •
- Gfunk
Rok uplatnění
Gfunk - Funkční vzorek
Comparison of efficiency of electrostatic micro-actuators for precise positioning
Comparison of several types of electrostatic micro-actuators is carried out, particularly with respect to their resultant force effects. The continuous mathematical model of such actuators is mostly described by the Laplace...
JA - Elektronika a optoelektronika, elektrotechnika
- 2013 •
- O
Rok uplatnění
O - Ostatní výsledky
Modeling Electrostatic MEMS Actuator
The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown tha...
Electrical and electronic engineering
- 2021 •
- D
Rok uplatnění
D - Stať ve sborníku
An interdisciplinary approach to the design of multiphysics mechatronic systems: The electrostatic actuator design case study
. In presented case study, we consider an electrostatic parallel-plate actuator. This type of actuator is one of the most successful commercialized examples of this actuator widely the electrostatic ac...
JA - Elektronika a optoelektronika, elektrotechnika
- 2016 •
- D
Rok uplatnění
D - Stať ve sborníku
Micromirror Driven by Electrostatic Actuation
JA - Elektronika a optoelektronika, elektrotechnika
- 1998 •
- X
Rok uplatnění
X - Nezařazeno
Position Sensing of Electrostatic MEMS Actuator
The paper deals with a sensing technique for electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The weight of the load and the torsional elasticity form a mechanical resonant system ...
Electrical and electronic engineering
- 2022 •
- D •
- Link
Rok uplatnění
D - Stať ve sborníku
Výsledek na webu
MEMS Structure - Micromirror Array
Electrostatic actuated micromirrors, design, simulation and modelling, prototype, measurement, encapsulating.
JB - Senzory, čidla, měření a regulace
- 2000 •
- D
Rok uplatnění
D - Stať ve sborníku
Operating sample of sliding actuator of 2nd generation
Operating sample of sliding actuator of 2nd generation simulates the real function of muscle cell in magnification 1000000:1, substitutes both van der Waals forces by magnetic forces and electrostatic forces by deformation forces....
EI - Biotechnologie a bionika
- 2007 •
- X
Rok uplatnění
X - Nezařazeno
Nanotechnology and convergence of technologies
The role of converegence of the fields and processing technologies for the future of nanotechnology...
JR - Ostatní strojírenství
- 2008 •
- O •
- Link
Rok uplatnění
O - Ostatní výsledky
Výsledek na webu
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