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Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry
Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry......
BM - Fyzika pevných látek a magnetismus
- 2002 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry
variable-angle spectroscopic ellipsometry. The shapes of the thickness non-uniform the imaging spectroscopic reflectometry and variable-angle spectroscopic ellipsometry...
Optics (including laser optics and quantum optics)
- 2020 •
- Jimp •
- Link
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Jimp - Článek v periodiku v databázi Web of Science
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Assessment of non-uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry
Standard variable-angle spectroscopic ellipsometry, mapping spectroscopic ellipsometry with microspot and imaging spectroscopic reflectometry are applied to optical characterisation of a ...
BM - Fyzika pevných látek a magnetismus
- 2014 •
- Jx •
- Link
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Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
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Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry
Two samples of silicon-single crystal substrates with randomly rough surfaces covered by native oxide layers are investigated by means of angle-resolved scattering, spectroscopic reflectometry and variable-angle
Optics (including laser optics and quantum optics)
- 2023 •
- Jimp •
- Link
Rok uplatnění
Jimp - Článek v periodiku v databázi Web of Science
Výsledek na webu
Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films
of thin films into the formulae employed within variable-angle spectroscopic ellipsometry is presented. It is based on a combination of the efficient formulae derived on the angle of incidence that take i...
BH - Optika, masery a lasery
- 2011 •
- Jx •
- Link
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Výsledek na webu
Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry
Two samples of silicon-single crystal substrates with randomly rough surfaces covered by native oxide layers are investigated by means of angle-resolved scattering, spectroscopic reflectometry and variable-angle
Optics (including laser optics and quantum optics)
- 2023 •
- Jimp •
- Link
Rok uplatnění
Jimp - Článek v periodiku v databázi Web of Science
Výsledek na webu
Optical characterisation of SiOxCyHz thin films non-uniform in thickness using spectroscopic ellipsometry, spectroscopic reflectometry and spectroscopic imaging reflectometry
The combined optical method enabling us to perform the complete optical characterisation of weakly absorbing non-uniform thin films is described. This method is based on the combination of standard variable angle spectroscopic
BH - Optika, masery a lasery
- 2011 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry
to variable angle of incidence spectroscopic ellipsometry (VASE) and near-normal incidence spectroscopic reflectometry (NNSR). It is shown that the ZrO2-films exhibit a depth......
BM - Fyzika pevných látek a magnetismus
- 2000 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Near-band-gap optical functions spectra and band-gap energies of GaNAs/GaAs superlattice
The optical properties of GaAs{GaAsN superlattice structures grown by metal-organic vapor-phase epitaxy are studied by variable angle-of-incidence spectroscopic ellipsometry....
BM - Fyzika pevných látek a magnetismus
- 2000 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Determination of anisotropic crystal optical properties using Mueller matrix spectroscopic ellipsometry
to its surface. The sample is characterized at variable angle of incidence and variable azimuthal rotation angle. The Mueller matrix spectra are fitted to the modelIn this paper the Mueller matrix ellipsometry...
BH - Optika, masery a lasery
- 2016 •
- D •
- Link
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D - Stať ve sborníku
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