Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements
Public support
Provider
Ministry of Education, Youth and Sports
Programme
—
Call for proposals
—
Main participants
Fyzikální ústav AV ČR, v. v. i.
Contest type
M2 - International cooperation
Contract ID
MSMT-17739/2021-3/4
Alternative language
Project name in Czech
Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements
Annotation in Czech
The overall objective of ID2PPAC is to demonstrate for the 2 nm node that the Performance Power Area and Cost (PPAC) requirements for this generation of leading edge logic technology can be achieved, by developing, consolidating and integrating selected technology solutions for "Lithography Equipment", "Metrology Equipment", "Mask Equipment" and "Process Development & Modules Integration."
Scientific branches
R&D category
AP - Applied research
OECD FORD - main branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
OECD FORD - secondary branch
10306 - Optics (including laser optics and quantum optics)
OECD FORD - another secondary branch
21001 - Nano-materials (production and properties)
CEP - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)
BH - Optics, masers and lasers<br>BM - Solid-state physics and magnetism<br>JJ - Other materials
Completed project evaluation
Provider evaluation
V - Vynikající výsledky projektu (s mezinárodním významem atd.)
Project results evaluation
FAFF:Ce,Mg crystal with accelerated scintillation response (ca 5 ns) was developed in FZU. It will be applied in fast SEM detector in new litographical scanners. Its application is also considered for detectors at accelerators in high energy physics.
Solution timeline
Realization period - beginning
Jun 1, 2021
Realization period - end
Dec 31, 2024
Project status
U - Finished project
Latest support payment
Feb 10, 2024
Data delivery to CEP
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data delivery code
CEP25-MSM-8A-U
Data delivery date
Jun 27, 2025
Finance
Total approved costs
4,692 thou. CZK
Public financial support
3,048 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
1,642 thou. CZK