Traceability of localised functional properties of nanostructures with high speed scanning probe microscopy
Public support
Provider
Ministry of Education, Youth and Sports
Programme
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Call for proposals
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Main participants
Český metrologický institut
Contest type
M2 - International cooperation
Contract ID
8B21006
Alternative language
Project name in Czech
Traceability of localised functional properties of nanostructures with high speed scanning probe microscopy
Annotation in Czech
The overall objective of this project is to design and develop technologies for transforming HS-SPM (~10 mm/s) metrology instruments for use in industrial high-speed quantitative multi-sensing metrology with a target traceable position measurement uncertainty of 1 nm. The developed instrument will be suitable for the industrial characterisation of functional nanostructure property combinations (electrical, chemical, mechanical, dimensional).
Scientific branches
R&D category
AP - Applied research
OECD FORD - main branch
10700 - Other natural sciences
OECD FORD - secondary branch
10700 - Other natural sciences
OECD FORD - another secondary branch
10700 - Other natural sciences
CEP - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)
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Solution timeline
Realization period - beginning
Sep 1, 2021
Realization period - end
Aug 31, 2024
Project status
K - Ending multi-year project
Latest support payment
Jan 30, 2024
Data delivery to CEP
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data delivery code
CEP24-MSM-8B-R
Data delivery date
Feb 19, 2024
Finance
Total approved costs
7,056 thou. CZK
Public financial support
7,056 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
0 thou. CZK