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Traceability of sub-nm length measurements

Public support

  • Provider

    Ministry of Education, Youth and Sports

  • Programme

  • Call for proposals

    FP6-2005-Energy-4

  • Main participants

    Český metrologický institut

  • Contest type

    RP - Co-financing of EC programme

  • Contract ID

    MSMT-45248/2013-7

Alternative language

  • Project name in Czech

    Traceability of sub-nm length measurements

  • Annotation in Czech

    The JRP SIB08 subnano will meet the growing requirement for the broader dissemination of the SI unit of length at the sub-nanometre level. This will be achieved with the development of state of the art techniques for sub nanometre length metrology by improving and cross verifying the metrology of x-ray interferometers, capacitive sensors and Fabry-Perot interferometers. This will lead to the investigation of a potential portable transfer standard for verifying the performance of sub-nanometre displacement measuring instrumentation outside of the purely NMI environment.

Scientific branches

  • R&D category

    AP - Applied research

  • CEP classification - main branch

    BH - Optics, masers and lasers

  • CEP - secondary branch

  • CEP - another secondary branch

  • OECD FORD - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)

    10306 - Optics (including laser optics and quantum optics)

Completed project evaluation

  • Provider evaluation

    U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)

  • Project results evaluation

    This project extended measurements in sub-nanometric length by the development of interferometers. Further the developed models of interferometers allow to introduce corrections and to determine measurement uncertainties for metrological traceability of such measurements.

Solution timeline

  • Realization period - beginning

    Jan 1, 2013

  • Realization period - end

    Jun 30, 2015

  • Project status

    U - Finished project

  • Latest support payment

    Feb 20, 2015

Data delivery to CEP

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

  • Data delivery code

    CEP16-MSM-7A-U/01:1

  • Data delivery date

    Oct 11, 2017

Finance

  • Total approved costs

    1,067 thou. CZK

  • Public financial support

    595 thou. CZK

  • Other public sources

    472 thou. CZK

  • Non public and foreign sources

    0 thou. CZK