Optical and tactile metrology for absolute form characterisation
Public support
Provider
Ministry of Education, Youth and Sports
Programme
—
Call for proposals
FP6-2005-Energy-4
Main participants
—
Contest type
RP - Co-financing of EC programme
Contract ID
MSMT-2490/2013-310
Alternative language
Project name in Czech
Optical and tactile metrology for absolute form characterisation
Annotation in Czech
Flatness metrology - This JRP will considerably improve absolute flatness measurements. The results of the investigation of the ability of capacitive sensors to reach an uncertainty of 10 nm in scanning applications will be significant for common industrial use in flatness measurements. Optical imaging metrology for curved surfaces - This JRP will develop and realise a new instrument based on recently invented tilted-wave interferometry. Tactile and optical single point metrology for curved surfaces - This JRP will lead to a reduction of the current measurement uncertainty by a factor of at least 2, i.e. down to 50 nm or less. Data analysis - This JRP will develop new algorithms and software including advanced computational geometry and high-level surface fitting for 3D freeform surface reconstruction and characterisation.
Scientific branches
R&D category
AP - Applied research
CEP classification - main branch
JB - Sensors, detecting elements, measurement and regulation
CEP - secondary branch
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CEP - another secondary branch
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OECD FORD - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)
20201 - Electrical and electronic engineering
Completed project evaluation
Provider evaluation
U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)
Project results evaluation
The CMI realized new capacitive method for relative flatness measurement which was successfully compared with absolute methods in CMI and PTB. PTB with partners developed Tilted Wave Interferometer for aspheric lens. Optical and tactile measurement methods were successfully compared and metrology practice guide was created.
Solution timeline
Realization period - beginning
Jan 1, 2012
Realization period - end
Aug 31, 2014
Project status
U - Finished project
Latest support payment
Mar 6, 2014
Data delivery to CEP
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data delivery code
CEP15-MSM-7A-U/01:1
Data delivery date
Jul 2, 2015
Finance
Total approved costs
1,878 thou. CZK
Public financial support
1,878 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
0 thou. CZK