Pushing boundaries of nano-dimensional metrology by light

Project name in Czech
Pushing boundaries of nano-dimensional metrology by light
Annotation in Czech
The overall goal of this project is to push the boundaries of optical measurement methods by realising a new generation of optical metrology systems, with unprecedented performances in terms of spatial resolution, traceability, reliability, and robustness. The objectives of the project are: 1. To develop accurate methods for measuring lateral features size below 10 nm at uncertainty levels of 0.1 nm using two types of far-field illumination far-field detection optical methods; 2. To develop innovative inelastic, non-linear or resonant optical metrology methods with a target uncertainty level of 1 nm, such as linear and non-linear SIM, and pump-probe Super Resolution Microscopy (SRM) techniques (e.g. Surface plasmon resonances (SPR) assisted Raman, coherent multiphoton-Raman and Stimulated Emission Depletion (STED). 3. To develop innovative imaging methods 4. To facilitate the take up of the knowledge, technology and measurement infrastructure developed in the project by the measurement supply chain, standards developing organisations (ISO, CEN) and end users in nanotechnology, micro-nanoelectronics, photonics and advanced materials.

R&D category
AP - Applied research
OECD FORD - main branch
10700 - Other natural sciences
OECD FORD - secondary branch
10700 - Other natural sciences
OECD FORD - another secondary branch
10700 - Other natural sciences
CEP - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)
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Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data delivery code
CEP24-MSM-8B-R
Data delivery date
Feb 19, 2024

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