Crystalline surfaces, self assembled structures, and nano-origami as length standards in (nano)metrology
Project goals
This JRP aims to develop new types of standards in the nanometre and sub-nanometre range to trace back instruments to the SI unit of length with a small uncertainty of u(h) = 10 pm (for step height prototypes) and to reveal characteristics of the instruments (flatness). New techniques will be developed by using the nature of crystalline materials as well as by using a promising lithographic technique based on block co-polymers. Another aim for the JRP is the use of the nano-origami technique as a production technique to fabricate structures of nanoscale size. Whereas the first aim will go beyond the current limit of available standards i.e. below 6 nm for step height and below 100 nm for pitch standards, the latter aim and techniques will be useful tocreate geometrically well-defined nano-objects that are necessary for the future validation of such instruments (e.g. AFM for the dimensional measurements of 3D-nano-objects).
Keywords
Public support
Provider
Ministry of Education, Youth and Sports
Programme
—
Call for proposals
FP6-2005-Energy-4
Main participants
Český metrologický institut
Contest type
RP - Co-financing of EC programme
Contract ID
MSMT-45248/2013-7
Alternative language
Project name in Czech
Crystalline surfaces, self assembled structures, and nano-origami as length standards in (nano)metrology
Annotation in Czech
This JRP aims to develop new types of standards in the nanometre and sub-nanometre range to trace back instruments to the SI unit of length with a small uncertainty of u(h) = 10 pm (for step height prototypes) and to reveal characteristics of the instruments (flatness). New techniques will be developed by using the nature of crystalline materials as well as by using a promising lithographic technique based on block co-polymers. Another aim for the JRP is the use of the nano-origami technique as a production technique to fabricate structures of nanoscale size. Whereas the first aim will go beyond the current limit of available standards i.e. below 6 nm for step height and below 100 nm for pitch standards, the latter aim and techniques will be useful tocreate geometrically well-defined nano-objects that are necessary for the future validation of such instruments (e.g. AFM for the dimensional measurements of 3D-nano-objects).
Scientific branches
Completed project evaluation
Provider evaluation
U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)
Project results evaluation
Following the condition that the candidate of financial contribution was evaluated and afterwards selected by international provider in accordance with the rules of the program the Ministry of Education, Youth ans Sports does not realize the evaluation of project results. The project is evaluated only after its approval by an international provider.
Solution timeline
Realization period - beginning
Oct 1, 2013
Realization period - end
Sep 30, 2016
Project status
U - Finished project
Latest support payment
Feb 24, 2016
Data delivery to CEP
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data delivery code
CEP17-MSM-7A-U/01:1
Data delivery date
Jun 20, 2017
Finance
Total approved costs
3,172 thou. CZK
Public financial support
1,816 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
1,356 thou. CZK
Basic information
Recognised costs
3 172 CZK thou.
Public support
1 816 CZK thou.
57%
Provider
Ministry of Education, Youth and Sports
CEP
BG - Nuclear, atomic and molecular physics, accelerators
Solution period
01. 10. 2013 - 30. 09. 2016