Laser sources and optical systems metrology in DUV spectral range
Public support
Provider
Technology Agency of the Czech Republic
Programme
—
Call for proposals
TREND 3 (STA02020FW030)
Main participants
Meopta - optika, s.r.o.<br>Meopta s.r.o.
Contest type
VS - Public tender
Contract ID
FW03010232 - Dodatek 1 ke smlouvě
Alternative language
Project name in Czech
Laserové zdroje záření a metrologie optických soustav v DUV spektrální oblasti
Annotation in Czech
Hlavním cílem projektu je ve spolupráci s Ústavem přístrojové techniky AV ČR, v. v. i. realizovat vlastní zdroj laserového záření na vlnových délkách 266 nm a 213 nm, adaptovat metrologické zázemí a metody především pro vlnové délky 213 nm a 193 nm pro uplatnění v budoucí produkci firmy Meopta-optika, s.r.o.
Scientific branches
R&D category
AP - Applied research
OECD FORD - main branch
10306 - Optics (including laser optics and quantum optics)
OECD FORD - secondary branch
20201 - Electrical and electronic engineering
OECD FORD - another secondary branch
20301 - Mechanical engineering
CEP - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)
BH - Optics, masers and lasers<br>JA - Electronics and optoelectronics<br>JB - Sensors, detecting elements, measurement and regulation<br>JR - Other machinery industry<br>JT - Propulsion, engines and fuels
Completed project evaluation
Provider evaluation
U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)
Project results evaluation
The project dealt with the topic of metrology of optical elements and the development of light sources in the DUV spectral range with the aim of supporting the development of high-value-added products at Meopta. Meopta verified several metrological procedures and equipment for element analysis at wavelengths of 213 and 266 nm, which is a relatively complicated topic given the quality of available lasers and optics for high photon energy. Another project participant, the Institute of Instrumentation of the Academy of Sciences of the Czech Republic, designed a new type of continuous lasers suitable for inspection techniques, as well as some other hi-tech applications. These functional samples were also proven to be functional and are suitable for further commercialization. It can be stated achieved all set goals and brought new technologies available to the Czech optics manufacturer. The opposing committee agreed that the project succeeded according to the terms of reference.
Solution timeline
Realization period - beginning
Jan 1, 2021
Realization period - end
Dec 31, 2024
Project status
U - Finished project
Latest support payment
Feb 28, 2024
Data delivery to CEP
Confidentiality
C - Předmět řešení projektu podléhá obchodnímu tajemství (§ 504 Občanského zákoníku), ale název projektu, cíle projektu a u ukončeného nebo zastaveného projektu zhodnocení výsledku řešení projektu (údaje P03, P04, P15, P19, P29, PN8) dodané do CEP, jsou upraveny tak, aby byly zveřejnitelné.
Data delivery code
CEP25-TA0-FW-U
Data delivery date
Jun 27, 2025
Finance
Total approved costs
33,643 thou. CZK
Public financial support
23,542 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
10,102 thou. CZK