Common path two-wavelength homodyne counting interferometer development

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F09%3A%230000121" target="_blank" >RIV/00177016:_____/09:#0000121 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Common path two-wavelength homodyne counting interferometer development

Original language description

The linearity of displacement measurement is an important parameter in nanometrology. The development of the common path two-wavelength (633 nm and 532 nm) homodyne counting interferometer within the Nanotrace project is described. These two differentialinterferometers are also designed for the elimination of optical path drifts and fluctuations. Their short-term instability is projected to be in the order of tens of pm in the single wavelength path difference and below 10 pm in the difference of thesetwo wavelength path differences. This solution enables better real-time validation of interferometer fringe interpolation. The whole system could be transportable and measure displacements up to 100 ?m under ambient air conditions under cover. Refractive index compensation will also be included.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

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Continuities

R - Projekt Ramcoveho programu EK

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Measurement Science and Technology

ISSN

1361-6501

e-ISSN

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Volume of the periodical

20

Issue of the periodical within the volume

8

Country of publishing house

GB - UNITED KINGDOM

Number of pages

4

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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