Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO(2)
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F11%3A%230000393" target="_blank" >RIV/00177016:_____/11:#0000393 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1088/0957-0233/22/9/094021" target="_blank" >http://dx.doi.org/10.1088/0957-0233/22/9/094021</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/0957-0233/22/9/094021" target="_blank" >10.1088/0957-0233/22/9/094021</a>
Alternative languages
Result language
angličtina
Original language name
Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO(2)
Original language description
The thickness measurement of transparent layers with optical techniques is very problematic. The observed deviations can easily reach 100% of the layer thickness to be measured. In order to analyse these deviations, tactile reference measurements have been developed. The proposed method is based on contact mode measurements with low contact pressure. With stylus instruments, this can be realized either by using the recommended tip radius of 2 mu m and very small probing forces in the micronewton range (and low scanning speeds of 50 mu m s(-1)) or by using the recommended probing force of 750 mu N, but a large probing tip radius. Three metal layers on silicon or silicon dioxide and two polymer resist materials on a thin chromium adhesive layer on silicon are used as artefacts. The comparison of the optical measurements with the tactile reference values disclosed deviations of the optical measurements of up to 195% of the layer thickness. Layer thicknesses were between 200 nm and 4 mu m.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/KAN311610701" target="_blank" >KAN311610701: Nanometrology using methods of scanning probe microscopy</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Measurement Science and Technology
ISSN
0957-0233
e-ISSN
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Volume of the periodical
22
Issue of the periodical within the volume
9
Country of publishing house
GB - UNITED KINGDOM
Number of pages
14
Pages from-to
094021-094034
UT code for WoS article
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EID of the result in the Scopus database
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