Setting probing force and scanning speed of fast microprobes for non-destructive roughness and microform measurements
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F21%3AN0000090" target="_blank" >RIV/00177016:_____/21:N0000090 - isvavai.cz</a>
Result on the web
<a href="https://www.ptb.de/empir2018/fileadmin/documents/empir/MicroProbes/Good_Practice_Guide_No_2_MicroProbes_Force_Speed.pdf" target="_blank" >https://www.ptb.de/empir2018/fileadmin/documents/empir/MicroProbes/Good_Practice_Guide_No_2_MicroProbes_Force_Speed.pdf</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Setting probing force and scanning speed of fast microprobes for non-destructive roughness and microform measurements
Original language description
This Good Practice Guide (GPG) was developed during the course of the EMPIR project MicroProbes “Multifunctional ultrafast microprobes for on ‐ the ‐ machine measurements”. Within this project fast piezoresistive silicon microprobes were developed for fast roughness measurements and mechanical property measurements. During fast tactile topography measurements, the inertia of the microprobe cantilever creates dynamic forces which might lead to tip flight and thus measurement errors. To prevent from tip flight, usually the highest possible probing forces are used. These are mainly given by the hardness of the surface to be measured. The Good Practice Guide helps users of microprobes to set the probing force and the maximum scanning speed of their microprobing system for reliable topography and roughness measurements.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
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OECD FORD branch
21100 - Other engineering and technologies
Result continuities
Project
<a href="/en/project/8B18006" target="_blank" >8B18006: Multifunctional ultrafast microprobes for on-the-machine measurements</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů