Tip dilation artefacts & roughness measurement – parametric approach

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F19%3A00113382" target="_blank" >RIV/00216224:14740/19:00113382 - isvavai.cz</a>
Result on the web
<a href="http://nanometrologie.cz/sbornik_2019.pdf" target="_blank" >http://nanometrologie.cz/sbornik_2019.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Tip dilation artefacts & roughness measurement – parametric approach
Original language description
Morphological dilation of surface with AFM tip (tip convolution) is a more or less unavoidable effect which distorts the measured topography. Hence many reconstruction methods based on Legendre transformation or Villarrubia’s morphological algorithms were proposed and studied as well as various other corrections for specific measured geometrical shapes. In characterisation of randomly rough surfaces we are usually only interested in statistical quantities, such as mean square roughness or autocorrelation length. Therefore, a different approach can be taken. Instead of attempting to reconstruct the surface, we find the map (true roughness parameters; tip parameters) - (measured parameters) for a specific class of rough surfaces. This allows a simple and fast estimation of tip convolution influence and, to a certain degree, also correction. We explore this avenue for Gaussian surfaces, show how composite parameters allow reducing the dimensionality of the problem and elucidate some interesting related phenomena, such as the increase of measured roughness with tip wear
Czech name
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Czech description
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Project
<a href="/en/project/LQ1601" target="_blank" >LQ1601: CEITEC 2020</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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