Comparison of the performance of the next generation of optical interferometers

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F12%3A%230000721" target="_blank" >RIV/00177016:_____/12:#0000721 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Comparison of the performance of the next generation of optical interferometers
Original language description
Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for national metrology institutes to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community thereby supporting the growth in nanotechnology. Several approaches were followed in order to developthe interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers by using an x-ray interferometer to generate traceable reference displacements.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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