Laser interferometric measuring system for positioning in nanometrology
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00351325" target="_blank" >RIV/68081731:_____/10:00351325 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Laser interferometric measuring system for positioning in nanometrology
Original language description
In this contribution we present a development of a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The key goal for introduction of interferometer measurement is not only improvement of resolution but the direct traceability to the primary etalon of length. Interferometry compared to a host of other optical length measuring techniques [1,2,3...]represents the most precise measuring technique available. The system is being developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
WSEAS Transactions on Circuits and Systems
ISSN
1109-2734
e-ISSN
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Volume of the periodical
9
Issue of the periodical within the volume
10
Country of publishing house
GR - GREECE
Number of pages
10
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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