Multiaxis interferometric displacement measurement for local probe microscopy

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00372559" target="_blank" >RIV/68081731:_____/12:00372559 - isvavai.cz</a>

Alternative codes found

RIV/00177016:_____/12:#0000543

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Multiaxis interferometric displacement measurement for local probe microscopy

Original language description

We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control ispresented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2012

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Central European Journal of Physics

ISSN

1895-1082

e-ISSN

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Volume of the periodical

10

Issue of the periodical within the volume

1

Country of publishing house

PL - POLAND

Number of pages

7

Pages from-to

225-231

UT code for WoS article

000297743800028

EID of the result in the Scopus database

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