Interferometric coordinates measurement sytem for local probe microscopy nanometrology

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00397860" target="_blank" >RIV/68081731:_____/14:00397860 - isvavai.cz</a>

Result on the web

—

DOI - Digital Object Identifier

—

Result language

angličtina

Original language name

Interferometric coordinates measurement sytem for local probe microscopy nanometrology

Original language description

We present an overview of new approaches to the design of nanometrology measuring system with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning setup with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

Czech name

—

Czech description

—

Type

D - Article in proceedings

CEP classification

—

OECD FORD branch

10306 - Optics (including laser optics and quantum optics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

NANOCON 2013, 5TH INTERNATIONAL CONFERENCE

ISBN

978-80-87294-47-5

ISSN

—

e-ISSN

—

Number of pages

6

Pages from-to

—

Publisher name

TANGER Ltd

Place of publication

—

Event location

Brno

Event date

Oct 16, 2013

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

000352070900143