6-axis interferometric coordinates measurement system for nanometrology

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00431959" target="_blank" >RIV/68081731:_____/14:00431959 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1117/12.2054802" target="_blank" >http://dx.doi.org/10.1117/12.2054802</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2054802" target="_blank" >10.1117/12.2054802</a>

Result language

angličtina

Original language name

6-axis interferometric coordinates measurement system for nanometrology

Original language description

We present an overview of approaches to the design of nanometrology coordinates measuring setup with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning system with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The practical measurement results of active compensation system for positioning angle errors suppression are presented as well as the analysis of overall achievable parameters. The system is being developed in cooperation with

Czech name

—

Czech description

—

Type

D - Article in proceedings

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

—

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Photonic Instrumentation Engineering (Proceedings of Spie 8992)

ISBN

—

ISSN

0277-786X

e-ISSN

—

Number of pages

8

Pages from-to

"89920W:1"-"8"

Publisher name

SPIE

Place of publication

Bellingham

Event location

San Francisco

Event date

Feb 2, 2014

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

000337143700023