Nanometrology interferometric coordinates measurement system for local probe microscopy
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F13%3A00398396" target="_blank" >RIV/68081731:_____/13:00398396 - isvavai.cz</a>
Alternative codes found
RIV/00177016:_____/13:#0001046
Result on the web
<a href="http://dx.doi.org/10.1117/12.2035477" target="_blank" >http://dx.doi.org/10.1117/12.2035477</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2035477" target="_blank" >10.1117/12.2035477</a>
Alternative languages
Result language
angličtina
Original language name
Nanometrology interferometric coordinates measurement system for local probe microscopy
Original language description
We present an overview of approaches to the design of nanometrology measuring setups with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a positioning system with interferometricmultiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the microand nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Sixth International Symposium on Precision Mechanical Measurements (Proceedings of SPIE 8916)
ISBN
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ISSN
0277-786X
e-ISSN
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Number of pages
7
Pages from-to
"89160C: 1"-"7"
Publisher name
SPIE
Place of publication
Bellingham
Event location
Guiyang
Event date
Aug 8, 2013
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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