Study of uncertainties of height measurements of monoatomic steps on Si 5 × 5 using DFT
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F17%3AN0000031" target="_blank" >RIV/00177016:_____/17:N0000031 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/17:00473812
Result on the web
<a href="http://iopscience.iop.org/article/10.1088/1361-6501/aa5075" target="_blank" >http://iopscience.iop.org/article/10.1088/1361-6501/aa5075</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6501/aa5075" target="_blank" >10.1088/1361-6501/aa5075</a>
Alternative languages
Result language
angličtina
Original language name
Study of uncertainties of height measurements of monoatomic steps on Si 5 × 5 using DFT
Original language description
Sources of uncertainty for height measurements using atomic force microscopy (AFM) in contact mode are discussed. Results of density functional theory (DFT) modeling of AFM scans on a monoatomic step on silicon 5x5 are presented. Van der Waals forces for the interaction of a spherical tip and an infinite step are calculated classically. Height measurements in constant force mode at different forces are simulated. The behavior of different tips is studied along with their impact on the resulting AFM scans.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10301 - Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)
Result continuities
Project
<a href="/en/project/7AX13032" target="_blank" >7AX13032: Crystalline surfaces, self assembled structures, and nano-origami as length standards in (nano)metrology</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Measurement Science and Technology
ISSN
0957-0233
e-ISSN
1361-6501
Volume of the periodical
28
Issue of the periodical within the volume
3
Country of publishing house
GB - UNITED KINGDOM
Number of pages
6
Pages from-to
nestrankovano
UT code for WoS article
000399553900001
EID of the result in the Scopus database
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