Environmental influences on autocollimator-based angle and form metrology

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F19%3AN0000003" target="_blank" >RIV/00177016:_____/19:N0000003 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Environmental influences on autocollimator-based angle and form metrology

Original language description

Deflectometric profilometers are indispensable tools for the precision form measurement of beam-shaping optics of synchrotrons and x-ray free electron lasers. They are used in metrology labs for x-ray optics worldwide and are crucial for providing measurement accuracy dictated by the form tolerances for modern state-of-the-art x-ray optics. Deflectometric profilometers use surface slope (angle) to assess form, and they utilize commercial autocollimators for the contactless slope measurement. In this contribution, we discuss the influences of environmental parameters, such as temperature and air pressure, including their gradients, on high-accuracy metrology with autocollimators in profilometers. They can cause substantial systematic errors in form measurement, especially in the case of large and strongly curved optical surfaces of high dynamic range. Relative angle and form measuring errors of the order of 1E-4 are to be expected. We characterize environmental influences by extended theoretical and experimental investigations and derive strategies for correcting them. We also discuss the possibility to minimize the contributions of some errors by the application of sophisticated experimental arrangements and methods. This work aims at approaching fundamental limits in autocollimator-based slope and form metrology.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10306 - Optics (including laser optics and quantum optics)

Project

<a href="/en/project/7AX13030" target="_blank" >7AX13030: Angle metrology</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2019

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Review of Scientific Instruments

ISSN

0034-6748

e-ISSN

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Volume of the periodical

90

Issue of the periodical within the volume

2

Country of publishing house

US - UNITED STATES

Number of pages

15

Pages from-to

021705

UT code for WoS article

000460095300006

EID of the result in the Scopus database

2-s2.0-85061641308